Nano Structuring Center

FIB Status
FIB Technology available Offers STSMs
Research Interests
Engineering and Technology in Research, Material Science, Physics & Astronomy
A summary of our fit4nano work

Contact Information
Germany
Name of Institution
Address
Gottlieb-Daimler-Str. Building 76 , 67663 Kaiserslautern Germany, Germany

Action Members
Nano Structuring Center
Thomas Loeber
Facilities Directory
What FIB technology is Available
Ga/Dual Beam
Other FIB technology

Cs Low-Temperature Ion Source

Complementary Techniques
AFM/cAFM/MFM, SEM, WDX/EDX
Sample Preparation/fabrication
ALD, dry etching, electron beam lithography, epitaxy, photolithography