Nano Structuring Center

FIB Status
FIB Technology available Offers STSMs
Research Interests
Engineering and Technology in Research, Material Science, Physics & Astronomy
A summary of our fit4nano work

Contact Information
Germany
Name of Institution
Address
Gottlieb-Daimler-Str. Building 76, 67663 Kaiserslautern Germany, Germany

Action Members
Nano Structuring Center
Thomas Loeber
Facilities Directory
What FIB technology is Available
Ga/Dual Beam
Other FIB technology

Cs Low-Temperature Ion Source

Complementary Techniques
AFM/cAFM/MFM, SEM, WDX/EDX
Sample Preparation/fabrication
ALD, dry etching, electron beam lithography, epitaxy, photolithography

The fit4nano COST Action has now finished

This site is no longer maintained and we have moved the important fit4nano information across to the EU-FIB-NET website